PureGuard

Proprietary system design for LVP (Low Vapor Pressure) gas temperature control.

LVP Gas Temp Control

The PureGuard gas temperature controller coupled with the PureGuard cylinder jacket is a reliable system to control the temperature of your critical high purity process gases.

The PureGuard temperature control system is capable of controlling to +/- 0.05* Celsius; using a compressor free solid state cooling system in an energy efficient, compact package.

Typical applications are for low vapor pressure gases as those used commonly in CVD and Etch.

The PureGuard gas temperature control system has a built-in recirculation pump that pumps fluid through a heat exchange jacket.

The controller maintains fluid temperature either cooling or heating depending on the need using a complete solid-state technology.

Benefits

  • Compact Control Module (~12” square)-No CFC’s or Compressor Maintenance
  • Solid State Thermal Technology-Lower Power Consumption
  • Heat resistant Kevlar Jacket with Polyester Outer Provides the Ability For One Jacket to be Used on Many Cylinder Sizes
  • Full Surface Insulated Contact for Maximum Efficiency
  • Power: 115-230VAC, 50/60Hz, 7/5A

Sample Part #: NVT-PGX-X-X

X
1st X:Jacket
1= Single Jacket, 2= Dual Jacket, 3= Triple Jacket
X
2nd X:Connection
A= 4’ Primary Fluid Connection, B= 6’ Primary Fluid Connection, C= 8’ Primary Fluid Connection, D= 10’ Primary Fluid Connection
X
3rd X:Measurement
1= 50’ Tall 8’ Diameter Nominal Bottle, 4= 18’ Tall 7’ Diameter Nominal Bottle

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